Technical Details of Glass Panels
SCHOTT Glass Panels for advanced semiconductor packaging
| Properties* | Specification |
|---|---|
| CTE range (20 - 300° C)** |
3.2 | 3.3 | 5.0 | 7.2 |
| Format | 510 x 515 mm |
| Panel Thickness** (initial) |
0.5 – 1.1 mm |
| Thickness Tolerance range*** |
± 10 – 20 µm |
| TTV range*** |
≤ 10 – 20 µm |
| Warp range*** |
≤ 100 – 200 µm |
| Scratch/Dig |
40/20 |
| Particles (non-removable) |
≤ 100 – 200 µm |
| Edge defects |
≤ 100 – 200 µm |
| Edge processing |
round or chamfer shape, grinded |
* Tighter specifications upon request
** Other materials or thicknesses upon request
*** Depending on glass type and thickness