Microscopic pressure sensor for MEMS package

Sensors

Sensors play a crucial role in ensuring safety, reliabitliy, and efficiency across a range of applications, from pressure sensors to positioning sensors. These applications demand materials that can deliver exceptional performance in harsh environments. With decades of expertise in electronics packaging, SCHOTT is perfectly suited to meet the rigorous needs of sensor applications.
Industrial Pressure Sensor; Manometric Thermometer.

Pressure sensors

Pressure sensors are widely used in semiconductor application. They monitor and regulate pressures in vacuum chambers (e.g., during etching or CVD), gas delivery systems, and pumping lines to ensure precise conditions for wafer processing. Additionally, they detect leaks and maintain stability in tools like lithography scanners and plasma etchers.

Products
Industrial machine actuators

Actuators

In semiconductor manufacturing, actuators enable precision motion control, positioning, and automation in various processes such as wafer handling, lithography, etching, and inspection. Hermetic packaging protects piezoelectric actuators in mass flow controllers from corrosive gases, moisture, and dust, ensuring long-term precision in semiconductor manufacturing. SCHOTT’s hermetic sealing prevents damage, reduces drift, and extends lifespan of actuators, enabling reliable, high-yield production in ultra-clean environments.

Products
Technician repairing engine component

Gas sensors

Gas sensors are important to ensure yield, safety and compliance in semiconductor manufacturing. For example, gas sensors can detect toxic and flammable gases from the manufacturing process and check air quality in cleanrooms. The gas sensors with SCHOTT hermetic packages and feedthrough have improved performance, reliability.

Products
A closeup shot of a chemical vapor deposition CVD chamber, which is used to deposit thin films of material onto the wafer surface.

Temperature sensor

For semiconductor manufacturing, precise temperature control and monitoring is key for ensuring high quality and reliable semiconductor devices. Fiber optic temperature sensing provides highly accurate remote temperature readings in this challenging environment. For example, fiber optic temperature sensing can be an option in layer deposition machines, where temperature monitoring is crucial for ensuring the deposited layers meet specifications.

Products
Silicon Wafer during Photolithography Process.

Positioning sensor

In photolithography, we design fiber optic solutions for alignment and overlay systems that ensure various layers are precisely aligned, which is essential for device functionality.

Products